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Overcoming Limitations of Silicon Carbide Heteroepitaxy on Silicon Wafers

Dr. Maksym Myronov’s invited lecture at the conference Microelectronics, Electronics and Electronic Technology /MEET

 

Dr. Maksym Myronov will give an invited talk entitled “Overcoming Limitations of Silicon Carbide Heteroepitaxy on Silicon Wafers” within the Microelectronics, Electronics and Electronic Technology Conference at MIPRO 2019. 

Professor Myronov will give invited talk on the novel low-temperature epitaxy technology, leading to the invention of state of the art wafer scale heteroepitaxy of  3C-SiC on standard silicon substrates. The invented technology offers many advantages over the traditional high temperature growth process of 3C-SiC, such as reduced maintenance costs, higher volume production and integration with other group IV and III-V semiconductors which can be grown on Si or SOI wafers. The growth of SiC on Si substrates of various crystallographic orientation opens an opportunity for the low cost mass production of 3C-SiC heterostructures on large diameter Si substrates up to 300mm diameter by the existing network of semiconductor industry cold wall Chemical Vapour Deposition (CVD) reactors. High quality 3C-SiC/Si epi wafers with suppressed wafer bow, smooth surface and low background doping are demonstrated opening the possibility for application of the material in long awaiting low-cost power electronics, RF, photonic and sensor devices.

Dr. Maksym Myronov is a head of the Nano-Silicon Group and Associate Professor at the Department of Physics, University of Warwick, UK. He is an expert in epitaxial growth, materials characterization and devices technologies of the group IV and III-V semiconductors.


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Thursday, April 11, 2019

 

MIPRO News
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     Smart Island and Regions Lab

    Partnership Development Conference

    Sept 30 - Oct 2 2019

    Mljet Island, Croatia

     

    The one of the objectives of the conference is to start dialog on the topic of Smart Island as a Lab for social and technological innovation for comprehensive & sustainable living and tourism development.

    The topic is very relevant for Croatia, Mediterranean region and several Scandinavian- Baltic countries such Finland, Sweden, Estonia, Norway, Denmark.

    The one of the central ideas of this strategy is to develop a multidisciplinary collaboration between key stakeholders and research community (nationally and internationally) to help solving complex problems and challenges of smart regions and islands. It includes regional development, economic growth, infrastructure and services, environment, social cohesion, immigration and the sustainable tourism.

    We are putting forward the scientific systematic approach, extensive use of Smart ICT, socio-technological integration, the use of advanced innovation methods and tools such as Living Labs.

    https://www.smartislandregion.com/

  • 5/9/2019

    MIPRO 2019 will be held under the patronage of the President of the Republic of Croatia, Kolinda Grabar-Kitarović

     
     

    President of the Republic of Croatia Kolinda Grabar-Kitarović has accepted the high patronage of the 42nd International ICT Convention MIPRO 2019 which will take place from 20 to 24 May this year in Opatija. [more]

     

  • 5/9/2019

    Croatian Minister of Science and Education, Blaženka Divjak Ph.D. at the MIPRO 2019 convention

     
     

    Blaženka Divjak, Croatian Minister of Science and Education, will hold a plenary keynote lecture on "Strategic Planning in Higher Education and Science" on Thursday, 23 May, as part of the presentation of project results of the Croatian Science Foundation “HigherDecision”. [more]

     

 
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